{"id":320,"date":"2026-05-07T17:14:14","date_gmt":"2026-05-07T09:14:14","guid":{"rendered":"https:\/\/boronnitrideceramic.com\/?p=320"},"modified":"2026-05-07T17:14:14","modified_gmt":"2026-05-07T09:14:14","slug":"%ec%9c%a1%eb%b0%a9%ec%a0%95-%ec%a7%88%ed%99%94-%eb%b6%95%ec%86%8c-%ed%8a%b9%ec%84%b1-%eb%b0%8f-%ed%98%84%eb%8c%80-%ec%a0%84%ec%9e%90-%ec%a0%9c%ed%92%88%ec%97%90%ec%84%9c%ec%9d%98-%ec%9d%91%ec%9a%a9","status":"publish","type":"post","link":"https:\/\/boronnitrideceramic.com\/ko\/hexagonal-boron-nitride-properties-and-applications-in-modern-electronics\/","title":{"rendered":"\uc721\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c: \ud604\ub300 \uc804\uc790\uc81c\ud488\uc758 \ud2b9\uc131 \ubc0f \uc751\uc6a9 \ubd84\uc57c"},"content":{"rendered":"

\uc721\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c: \ud604\ub300 \uc804\uc790\uc81c\ud488\uc758 \ud2b9\uc131 \ubc0f \uc751\uc6a9 \ubd84\uc57c<\/h1>\n

\uc8fc\uc694 \ub0b4\uc6a9<\/h2>\n

\uc721\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c\ub294 \uc5f4\uc801, \uc804\uae30\uc801, \uae30\uacc4\uc801 \ud2b9\uc131\uc758 \ub3c5\ud2b9\ud55c \uc870\ud569\uc744 \ud1b5\ud574 \ud604\ub300 \ubc18\ub3c4\uccb4 \uae30\uc220\uc758 \uc911\uc694\ud55c \uacfc\uc81c\ub97c \ud574\uacb0\ud558\ub294 \ud68d\uae30\uc801\uc778 \uc7ac\ub8cc\ub85c \ubd80\uc0c1\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\u2022 \ud0c1\uc6d4\ud55c \uc5f4 \uad00\ub9ac<\/strong>h-BN\uc740 585W\/m-K\uc758 \ub6f0\uc5b4\ub09c \ud3c9\uba74 \ub0b4 \uc5f4\uc804\ub3c4\uc728\uc744 \ub2ec\uc131\ud558\uc5ec \uace0\uc804\ub825 3D \uc9d1\uc801 \ud68c\ub85c \ubc0f \uc801\uce35\ud615 \uc7a5\uce58 \uc544\ud0a4\ud14d\ucc98\uc5d0\uc11c \ud6a8\uacfc\uc801\uc778 \uc5f4 \ubc29\ucd9c\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4.<\/p>\n

\u2022 \ucd08\uc800 \uc720\uc804\uccb4 \uc131\ub2a5<\/strong>: \uc544\ubab0\ud37c\uc2a4 BN \ud544\ub984\uc740 1.78\uc758 \ub0ae\uc740 \uc720\uc804 \uc0c1\uc218\uc5d0 \ub3c4\ub2ec\ud558\uc5ec \uacf5\uae30\uc758 \ud2b9\uc131\uc5d0 \uadfc\uc811\ud558\uba74\uc11c\ub3c4 \uace0\uae09 \uc0c1\ud638 \uc5f0\uacb0 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c 7.3 MV\/cm\uc758 \ud30c\uad34 \uac15\ub3c4\ub97c \uc720\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n

\u2022 \ud5a5\uc0c1\ub41c 2D \uba38\ud2f0\ub9ac\uc5bc \uc131\ub2a5<\/strong>h-BN \uae30\ud310\uc740 \uadf8\ub798\ud540 \uce90\ub9ac\uc5b4 \uc774\ub3d9\uc131\uc744 5,000-10,000 cm\u00b2\/V-s\uc5d0\uc11c 20,000-60,000 cm\u00b2\/V-s\ub85c \ud5a5\uc0c1\uc2dc\ucf1c \ucc28\uc138\ub300 \uc804\uc790 \uae30\uae30\uc5d0 \ud601\uc2e0\uc744 \uc77c\uc73c\ud0b5\ub2c8\ub2e4.<\/p>\n

\u2022 \ud655\uc7a5 \uac00\ub2a5\ud55c \ud569\uc131 \ubc29\ubc95<\/strong>: \uc6d0\uc790 \uc218\uc900\uc758 \ub450\uaed8 \uc81c\uc5b4\ub85c \uc6e8\uc774\ud37c \uaddc\ubaa8\uc758 \uc0dd\uc0b0\uc744 \uac00\ub2a5\ud558\uac8c \ud558\ub294 CVD, ALD \ubc0f MOCVD \uae30\uc220\ub85c \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0 \uc0c1\uc5c5\uc801 \ud1b5\ud569\uc744 \uc2e4\ud604\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\u2022 \ub6f0\uc5b4\ub09c \uc720\uc804\uccb4 \uc2e0\ub8b0\uc131<\/strong>h-BN\uc740 15 MV\/cm \uc774\uc0c1\uc758 \ud30c\uad34 \ud544\ub4dc\uc640 10-\u2078 ~ 10-\u00b9\u2070 A\/cm\u00b2\uc758 \ub204\uc124 \uc804\ub958\ub97c \ubcf4\uc5ec \uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c \ubc0f \uc54c\ub8e8\ubbf8\ub098\uc640 \uac19\uc740 \uae30\uc874 \uc18c\uc7ac\ubcf4\ub2e4 \ud6e8\uc52c \ub6f0\uc5b4\ub09c \uc131\ub2a5\uc744 \ubc1c\ud718\ud569\ub2c8\ub2e4.<\/p>\n

\ub6f0\uc5b4\ub09c \ud2b9\uc131\uacfc \uc131\uc219\ud55c \ud569\uc131 \uae30\uc220\uc758 \uc735\ud569\uc73c\ub85c \uc721\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c\ub294 \ud2b9\ud788 \uc5f4 \uad00\ub9ac \ubc0f \ucd08\uc800\uc720\uc804\uccb4 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \ucc28\uc138\ub300 \ubc18\ub3c4\uccb4 \ud601\uc2e0\uc744 \uc8fc\ub3c4\ud560 \ucd08\uc11d \uc7ac\ub8cc\ub85c \uc790\ub9ac\ub9e4\uae40\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc721\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c\ub294 \ub9c8\uc774\ud06c\ub85c \uc77c\ub809\ud2b8\ub85c\ub2c9\uc2a4 \ubc0f \ubc18\ub3c4\uccb4 \uae30\uc220\uc744 \ubc1c\uc804\uc2dc\ud0a4\ub294 \ub370 \uc911\uc694\ud55c \uc7ac\ub8cc\ub85c \uc8fc\ubaa9\ubc1b\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ubd95\uc18c\uc640 \uc9c8\uc18c\uc758 \uc5f4 \ubc0f \ud654\ud559\uc801 \ub0b4\ud654\uc131 \ud654\ud569\ubb3c\uc740 \ud751\uc5f0\uacfc \uad6c\uc870\uc801 \uc720\uc0ac\uc131\uc744 \uacf5\uc720\ud569\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \uae30\uc874 \uc18c\uc7ac\uac00 \ub530\ub77c\uc62c \uc218 \uc5c6\ub294 \ub6f0\uc5b4\ub09c \uc5f4\uc801, \ud654\ud559\uc801 \uc548\uc815\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc9c8\ud654\ubd95\uc18c \uc138\ub77c\ubbf9\uc740 \ub2e4\uc591\ud55c \uad6c\uc870\uc801 \ud615\ud0dc\ub85c \uc874\uc7ac\ud558\uba70, \uc721\uac01\ud615 \ubcc0\ud615(h-BN)\uc774 \ub2e4\ud615\uc131 \uc911\uc5d0\uc11c \uac00\uc7a5 \uc548\uc815\uc801\uc785\ub2c8\ub2e4. \ub192\uc740 \uc5f4\uc804\ub3c4\uc728, \uac15\ub825\ud55c \uc804\uae30 \uc808\uc5f0\uc131, \ub0b4\ub9c8\ubaa8\uc131 \ubc0f \ub0b4\ud654\ud559\uc131, \uace0\uc628\uc5d0\uc11c\uc758 \ud0c1\uc6d4\ud55c \uc131\ub2a5 \ub4f1 h-BN\uc774 \ud604\ub300 \uc804\uc790\uc81c\ud488\uc5d0 \uac00\uce58 \uc788\ub294 \uc774\uc720\ub294 \uc774\ub7ec\ud55c \uace0\uc720\ud55c \ud2b9\uc131\uc758 \uc870\ud569 \ub54c\ubb38\uc785\ub2c8\ub2e4. \uc774 \uae00\uc5d0\uc11c\ub294 \uc721\ubc29\uc815 \uc9c8\ud654\ubd95\uc18c\uc758 \uae30\ubcf8 \ud2b9\uc131\uc744 \uc0b4\ud3b4\ubcf4\uace0 \ud569\uc131 \ubc0f \uc99d\ucc29 \uae30\uc220\uc5d0 \ub300\ud574 \uc54c\uc544\ubcf4\uaca0\uc2b5\ub2c8\ub2e4. \ub610\ud55c \ub9c8\uc774\ud06c\ub85c \uc77c\ub809\ud2b8\ub85c\ub2c9\uc2a4 \ubc0f \ubc18\ub3c4\uccb4 \uc18c\uc790\uc5d0\uc11c \ud655\ub300\ub418\uace0 \uc788\ub294 \uc751\uc6a9 \ubd84\uc57c\uc5d0 \ub300\ud574\uc11c\ub3c4 \ub17c\uc758\ud560 \uac83\uc785\ub2c8\ub2e4.<\/p>\n

\uad6c\uc870\uc801 \ud615\ud0dc \ubc0f \uae30\ubcf8 \uc18d\uc131<\/h2>\n

\uc721\uac01\ud615 BN(h-BN) \uacb0\uc815 \uad6c\uc870<\/h3>\n

\uc9c8\ud654\ubd95\uc18c\ub294 \uacf5\uac04 \uadf8\ub8f9 P6\u2083\/mmc\uc5d0 \uc18d\ud558\ub294 \uce35\uc0c1 \uc721\uac01\ud615 \uad6c\uc870\ub85c \uacb0\uc815\ud654\ub429\ub2c8\ub2e4. \uac01 \uce35\uc5d0\ub294 \ubd95\uc18c \uc6d0\uc790\uc640 \uc9c8\uc18c \uc6d0\uc790\uac00 \uacf5\uc720 \uacb0\ud569\uc73c\ub85c sp\u00b2 \ud63c\uc131\ud654\ub418\uc5b4 \uac01 \ubd95\uc18c \uc6d0\uc790\uac00 \uc138 \uac1c\uc758 \uc9c8\uc18c \uc6d0\uc790\uc640 \uc5f0\uacb0\ub418\uac70\ub098 \uadf8 \ubc18\ub300\ub85c \uc5f0\uacb0\ub418\ub294 \ubc8c\uc9d1 \uaca9\uc790\ub97c \ud615\uc131\ud558\ub294 \ubd95\uc18c \ubc0f \uc9c8\uc18c \uc6d0\uc790\uac00 \ud3ec\ud568\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. \uaca9\uc790 \ub9e4\uac1c\ubcc0\uc218\ub294 a = 2.504 \u00c5, c = 6.656 \u00c5\uc774\uba70 \uce35\uac04 \uac04\uaca9\uc740 0.333 nm\uc785\ub2c8\ub2e4. \uc57d\ud55c \ubc18\ub370\ub974\ubc1c\uc2a4 \ud798\uc740 \uc774\ub7ec\ud55c \uce35\uc744 \uc11c\ub85c \ubd99\uc7a1\uace0 h-BN\uc758 \ub9ce\uc740 \ud2b9\uc131\uc744 \uc815\uc758\ud558\ub294 \ud2b9\uc9d5\uc801\uc778 \uc774\ubc29\uc131 \uac70\ub3d9\uc744 \ub9cc\ub4e4\uc5b4\ub0c5\ub2c8\ub2e4. \ubd95\uc18c(2.04)\uc640 \uc9c8\uc18c(3.04) \uc0ac\uc774\uc758 \uc804\uae30 \uc74c\uc131\ub3c4 \ucc28\uc774\ub294 \ubd80\ubd84 \uc774\uc628 \ud2b9\uc131\uc744 \uc0dd\uc131\ud558\ub294 \uadf9\uc131 \uacf5\uc720 \uacb0\ud569\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4. \uc774\ub294 \ud3c9\uba74 \ub0b4 \uad6c\uc870\ub97c \uac15\ud654\ud569\ub2c8\ub2e4.<\/p>\n

\ud050\ube45 BN(c-BN) \ubc0f \uc544\ubab0\ud37c\uc2a4 BN(a-BN) \ubcc0\ud615<\/h3>\n

\uc785\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c\ub294 \ubd95\uc18c\uc640 \uc9c8\uc18c \uc6d0\uc790\uac00 \uc0ac\uba74\uccb4\uc801\uc73c\ub85c \uacb0\ud569\ub41c \uc2a4\ud314\ub7ec\ub77c\uc774\ud2b8 \uad6c\uc870\ub97c \ucc44\ud0dd\ud558\uc5ec sp\u00b3 \ud558\uc774\ube0c\ub9ac\ub4dc\ud654\ud569\ub2c8\ub2e4. 1957\ub144 \uace0\uc555 \ubc0f \uace0\uc628 \uc870\uac74\uc5d0\uc11c \ucd5c\ucd08\ub85c \ud569\uc131\ub41c c-BN\uc740 \ub2e4\uc774\uc544\ubaac\ub4dc\uc758 8,000kp\/mm\u00b2\uc5d0 \ube44\ud574 4,500kp\/mm\u00b2\uc758 \uacbd\ub3c4\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \uc774 \uc18c\uc7ac\uc758 \uac04\uc811 \ubc34\ub4dc\uac2d\uc740 5.4~7.0 eV \ubc94\uc704\uc774\uba70 \uaca9\uc790 \uc0c1\uc218\ub294 3.615\u00c5\uc785\ub2c8\ub2e4. c-BN\uc740 \uc0b0\ud654\uac00 \uc2dc\uc791\ub418\ub294 1,000\u00b0C\uae4c\uc9c0 \uc5f4 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4. \uc774\ub294 \ub2e4\uc774\uc544\ubaac\ub4dc\uc758 \uc548\uc815\uc131 \uc784\uacc4\uac12\uc778 800\u00b0C\ub97c \ub6f0\uc5b4\ub118\ub294 \uc218\uce58\uc785\ub2c8\ub2e4.<\/p>\n

\ube44\uc815\uc9c8 BN\uc740 \uc800\uc628 \ud569\uc131\uc744 \ud1b5\ud574 \uacf5\uc815\uc0c1\uc758 \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. 3nm\ub9cc\ud07c \uc587\uc740 \ud544\ub984\uc740 100kHz\uc5d0\uc11c 1.78\uc758 \ub0ae\uc740 \uc720\uc804 \uc0c1\uc218\ub97c \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. \uc720\uc804\uccb4 \uc751\ub2f5\uc740 \uc99d\ucc29 \uc628\ub3c4\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4. 65\u00b0C, 150\u00b0C, 250\u00b0C\uc5d0\uc11c \uc6d0\uc790\uce35\uc744 \uc99d\ucc29\ud558\uba74 \uac01\uac01 8.6, 4.6, 4.3\uc758 \u03ba \uac12\uc744 \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc5f4 \uc804\ub3c4\uc131 \ubc0f \ubc29\uc5f4 \ud2b9\uc131<\/h3>\n

\uc721\uac01\ud615 BN\uc740 \ub9e4\uc6b0 \ub69c\ub837\ud55c \uc774\ubc29\uc131 \uc5f4\uc804\ub2ec\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \ub2e8\ub3d9\uc870\uc131 \u00b9\u2070B h-BN \uacb0\uc815\uc740 \uc0c1\uc628\uc5d0\uc11c 585W m-\u00b9 K-\u00b9\uc758 \ud3c9\uba74 \ub0b4 \uc5f4\uc804\ub3c4\ub3c4\ub97c \ub2ec\uc131\ud558\uc5ec \uc790\uc5f0\uc801\uc73c\ub85c \ubc1c\uc0dd\ud558\ub294 h-BN\ubcf4\ub2e4 \uc57d 80% \ub354 \ub192\uc2b5\ub2c8\ub2e4. \ub2e8\uce35 BN\uc740 751W\/mK\uc5d0 \ub2ec\ud558\uba70 \ubc18\ub3c4\uccb4\uc640 \uc808\uc5f0\uccb4 \uc911 \ub2e8\uc704 \uc911\ub7c9\ub2f9 \uc5f4\uc804\ub3c4\uc728\uc774 \ub450 \ubc88\uc9f8\ub85c \ub192\uc2b5\ub2c8\ub2e4. \ud3c9\uba74 \uc678 \uc804\ub3c4\ub3c4\ub294 \ub2e8\uc77c \ub3d9\uc704 \uc6d0\uc18c \u00b9\u2070B \uc0d8\ud50c\uc758 \uacbd\uc6b0 3.5 \u00b1 0.8W m-\u00b9 K-\u00b9\ub85c \ud6e8\uc52c \ub0ae\uac8c \uc720\uc9c0\ub429\ub2c8\ub2e4. \uac01\uc9c8 \uc81c\uac70\ub41c \ud50c\ub808\uc774\ud06c\uc758 \uad50\ucc28 \ud3c9\uba74 \uce21\uc815\uc740 \ub450\uaed8\uc5d0 \ub530\ub77c \uac15\ud55c \uc758\uc874\uc131\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. 585nm \ub450\uaed8\uc5d0\uc11c 8.1 \u00b1 0.5W m-\u00b9 K-\u00b9\uc5d0\uc11c 7nm \ud50c\ub808\uc774\ud06c\uc758 \uacbd\uc6b0 0.20 \u00b1 0.06W m-\u00b9 K-\u00b9\ub85c \uac12\uc774 \uac10\uc18c\ud569\ub2c8\ub2e4.<\/p>\n

\uc720\uc804\uccb4 \ud2b9\uc131 \ubc0f \ubc34\ub4dc\uac2d \uac70\ub3d9<\/h3>\n

\ub2e8\uce35 h-BN\uc740 \uc2e4\uc628\uc5d0\uc11c 6.42eV\uc758 \uc9c1\uc811 \ubc34\ub4dc\uac2d\uc744 \uac00\uc9c0\uba70, \ubc8c\ud06c \ud615\ud0dc\uc5d0\uc11c\ub294 \uc57d 5.95eV\uc758 \uac04\uc811 \uac2d\uc73c\ub85c \uc804\ud658\ub429\ub2c8\ub2e4. \uc720\uc804\uccb4 \uc751\ub2f5\uc740 \ubc29\ud5a5 \uc758\uc874\uc131\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. \ud3c9\uba74 \ub0b4 \uc720\uc804 \uc0c1\uc218\ub294 6.82~6.93\uc774\uba70, \ud3c9\uba74 \uc678 \uc720\uc804 \uc0c1\uc218\ub294 3.29~3.76\uc5d0 \uac78\uccd0 \uc788\uc2b5\ub2c8\ub2e4. \ud3c9\uba74 \ub0b4 \uad6c\uc131 \uc694\uc18c\ub294 \ub450\uaed8\uac00 \ub2e4\ub978 \ub808\uc774\uc5b4\uc5d0 \ub300\ud574 \uc0c1\ub300\uc801\uc73c\ub85c \uc77c\uc815\ud558\uac8c \uc720\uc9c0\ub429\ub2c8\ub2e4. \ud3c9\uba74 \uc678 \uc0c1\uc218\ub294 \ub2e8\uc77c \ub808\uc774\uc5b4\uc5d0\uc11c \ubc8c\ud06c \ub808\uc774\uc5b4\ub85c \uac08\uc218\ub85d \uc57d 15% \uc99d\uac00\ud569\ub2c8\ub2e4.<\/p>\n

\ud569\uc131 \ubc0f \uc99d\ucc29 \ubc29\ubc95<\/h2>\n

\uace0\ud488\uc9c8 \uc721\ubc29\uc815 \uc9c8\ud654\ubd95\uc18c \uc0dd\uc0b0\uc744 \uc704\ud574\uc11c\ub294 \uc99d\ucc29 \ud30c\ub77c\ubbf8\ud130\uc640 \uc804\uad6c\uccb4 \ud654\ud559\uc5d0 \ub300\ud55c \uc815\ubc00\ud55c \uc81c\uc5b4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \ud2b9\uc815 \uc6a9\ub3c4\uc5d0 \ub530\ub77c \uac01\uae30 \ub2e4\ub978 \uc7a5\uc810\uc744 \uac00\uc9c4 \uc5ec\ub7ec \ud569\uc131 \uacbd\ub85c\uac00 \ub4f1\uc7a5\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n

\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uae30\uc220<\/h3>\n

CVD\ub294 \uc5ec\uc804\ud788 \ub300\uba74\uc801 h-BN \ud569\uc131\uc744 \uc704\ud55c \uc8fc\ub41c \ubc29\ubc95\uc785\ub2c8\ub2e4. \uc774 \uacf5\uc815\uc740 Cu\uc640 Ni\ub97c \ud3ec\ud568\ud558\ub294 \ucd09\ub9e4 \uae08\uc18d \uae30\ud310\uc5d0\uc11c \ub2e8\uc77c \uc18c\uc2a4 \uc804\uad6c\uccb4\ub85c \ubd95\uc18c(B\u2083N\u2083H\u2086) \ub610\ub294 \uc554\ubaa8\ub2c8\uc544 \ubcf4\ub780(NH\u2083BH\u2083)\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. 1,000\u00b0C\uc5d0 \uac00\uae4c\uc6b4 \uc628\ub3c4\uc640 250 Torr \uc774\ud558\uc758 \uc555\ub825\uc5d0\uc11c \uc800\uc555 CVD\ub97c \uc0ac\uc6a9\ud558\uba74 \uce35 \uc131\uc7a5\uc744 \uc81c\uc5b4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. Cu \uae30\ud310\uc740 \ubd95\uc18c \ubd84\uc555\uc774 17mTorr\uc744 \ucd08\uacfc\ud558\uba74 \uc131\uc7a5 \uc2dc\uac04\uc5d0 \ub530\ub77c \uc120\ud615\uc801\uc778 \ubc29\uc2dd\uc73c\ub85c \ub450\uaed8\uac00 \uc99d\uac00\ud569\ub2c8\ub2e4. Si\u2083N\u2084\/Si \uae30\ud310\uc5d0\uc11c\uc758 LPCVD \uc131\uc7a5\uc740 \uae30\ubcf8 \ud45c\uba74\uc5d0 \ube44\ud574 \uac70\uce60\uae30\uac00 3.4\ubc30 \uac10\uc18c\ud55c \uc5f0\uc18d\uc801\uc778 h-BN \ud544\ub984\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4. \uc774\ub294 \ubca0\uc5b4 Si\u2083N\u2084\uc5d0\uc11c 400 cm\u00b2\/Vs\uc5d0 \ube44\ud574 1,200 cm\u00b2\/Vs\uc758 \uadf8\ub798\ud540 \uc774\ub3d9\ub3c4\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\uc6d0\uc790\uce35 \uc99d\ucc29(ALD) \uacf5\uc815<\/h3>\n

ALD\ub294 \uc21c\ucc28\uc801\uc778 \uc804\uad6c\uccb4 \ub178\ucd9c\uc744 \ud1b5\ud574 \uc6d0\uc790 \uc218\uc900\uc758 \ub450\uaed8 \uc81c\uc5b4\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4. \ud50c\ub77c\uc988\ub9c8 \uac15\ud654 ALD\ub294 \ud2b8\ub9ac\uc5d0\ud2f8\ubcf4\ub808\uc774\ud2b8\uc640 N\u2082\/H\u2082 \ud50c\ub77c\uc988\ub9c8\ub97c \uc0ac\uc6a9\ud558\uc5ec 250~350\u00b0C\uc5d0\uc11c 1.1\u00c5\/\uc0ac\uc774\ud074\uc758 \uc131\uc7a5\ub960\ub85c h-BN\uc744 \uc99d\ucc29\ud569\ub2c8\ub2e4. ALD \uc628\ub3c4 \ucc3d\uc740 NH\u2083 \ubc18\uc751\ubb3c\uc744 \uc0ac\uc6a9\ud558\ub294 BCl3 \ub610\ub294 TDMAB \uc804\uad6c\uccb4\uc758 \uacbd\uc6b0 80-175\u00b0C\uc5d0 \uac78\uccd0 \uc788\uc2b5\ub2c8\ub2e4. \uc804\uc790 \uac15\ud654 ALD\ub294 \ubcf4\ub77c\uc9c4 \ubc0f \uc804\uc790 \ub178\ucd9c\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc2e4\uc628 \uc99d\ucc29\uc744 \ub2ec\uc131\ud558\uba70, 80-160 eV \uc804\uc790 \uc5d0\ub108\uc9c0\uc5d0\uc11c \ucd5c\ub300 3.2 \u00c5\/\uc0ac\uc774\ud074\uc758 \uc131\uc7a5\ub960\uc744 \ubcf4\uc785\ub2c8\ub2e4.<\/p>\n

\uae08\uc18d-\uc720\uae30\ubb3c CVD(MOCVD) \uc811\uadfc \ubc29\uc2dd<\/h3>\n

MOCVD\ub294 \ud2b8\ub9ac\uc5d0\ud2f8\ubcf4\ub780(TEB) \ubc0f NH\u2083 \uc804\uad6c\uccb4\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc6e8\uc774\ud37c \uc2a4\ucf00\uc77c \uade0\uc77c\uc131\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4. 1,000\u00b0C\uc758 \ud384\uc2a4 \ubaa8\ub4dc MOCVD\ub294 45nm \ud53c\uce58 \ubc0f 7:1 \uc885\ud6a1\ube44\ub85c \uc2e4\ub9ac\ucf58 \uae30\ubc18 \ub098\ub178\ud2b8\ub80c\uce58\uc5d0\uc11c \ucee8\ud3ec\uba40 \uc131\uc7a5\uc744 \ub2ec\uc131\ud569\ub2c8\ub2e4. \uc801\uc808\ud55c TEB \ud750\ub984 \uad00\ub9ac\ub97c \ud1b5\ud574 \uc131\uc7a5 \uc18d\ub3c4\ub294 70nm\/min\uc5d0 \uc774\ub985\ub2c8\ub2e4. \uc774 \uacf5\uc815\uc740 \uace0\uc554\ubaa8\ub2c8\uc544, \uace0\uc555 \uc870\uac74\uc5d0\uc11c 950\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\ub9cc \uc788\uc73c\uba74 \ub429\ub2c8\ub2e4.<\/p>\n

\uc800\uc628 \uc131\uc7a5 \ubc29\ubc95<\/h3>\n

\uc720\ub3c4 \uacb0\ud569 \ud50c\ub77c\uc988\ub9c8 CVD\ub294 \ubd95\uc18c\ub97c \uc0ac\uc6a9\ud558\uc5ec 400-500\u00b0C\uc5d0\uc11c \uc11d\uc601\uacfc Si\uc5d0 \ub2e4\uce35 h-BN\uc744 \ud569\uc131\ud569\ub2c8\ub2e4. \ucd5c\uc801\uc758 \uc870\uac74\uc73c\ub85c\ub294 500\u00b0C \uae30\ud310 \uc628\ub3c4\uc640 180W RF \ucd9c\ub825(H\u2082\/N\u2082 \uce90\ub9ac\uc5b4 \uac00\uc2a4 \uacb0\ud569)\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub807\uac8c \ud558\uba74 \ub450\uaed8\uac00 50nm\ub97c \ucd08\uacfc\ud558\ub294 \ud544\ub984\uc774 \uc0dd\uc131\ub429\ub2c8\ub2e4.<\/p>\n

\uae30\ud310 \uc120\ud0dd \ubc0f \ud1b5\ud569 \uacfc\uc81c<\/h3>\n

Cu \ubc0f Ni\uc640 \uac19\uc740 \uae08\uc18d \uae30\ud310\uc740 \uc131\uc7a5 \ud6c4 \uc804\uc0ac \uacf5\uc815\uc774 \ud544\uc694\ud558\uae30 \ub54c\ubb38\uc5d0 \uc624\uc5fc\uacfc \uae30\uacc4\uc801 \uc190\uc0c1\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. SiO\u2082 \ubc0f \uc0ac\ud30c\uc774\uc5b4\uc640 \uac19\uc740 \ube44\ucd09\ub9e4 \uae30\ud310\uc740 \uc5d0\ub108\uc9c0 \uc7a5\ubcbd\uc744 \uadf9\ubcf5\ud558\uae30 \uc704\ud574 900\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. Si\u2083N\u2084\uc758 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc740 \ubc18\ub3c4\uccb4 \uacf5\uc815\uacfc\uc758 \ud638\ud658\uc131\uc744 \uc720\uc9c0\ud558\uba74\uc11c \uc804\uc0ac \ub2e8\uacc4\ub97c \uc81c\uac70\ud569\ub2c8\ub2e4.<\/p>\n

\ub9c8\uc774\ud06c\ub85c\uc77c\ub809\ud2b8\ub85c\ub2c9\uc2a4 \ubc0f \ubc18\ub3c4\uccb4 \uc18c\uc790\uc758 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h2>\n

\uc124\uba85\ud55c \ud569\uc131 \uae30\ub2a5\uc744 \ud1b5\ud574 \uc721\ubc29\uc815 \uc9c8\ud654\ubd95\uc18c\ub294 \ucd5c\uc2e0 \ubc18\ub3c4\uccb4 \uc18c\uc790\uc758 \uc911\uc694\ud55c \uacfc\uc81c\ub97c \ud574\uacb0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc778\ud130\ucee4\ub125\ud2b8\uc6a9 \ucd08\uc800-k \uc720\uc804\uccb4 \uc7ac\ub8cc<\/h3>\n

3nm \ub450\uaed8\uc758 \ube44\uc815\uc9c8 \uc9c8\ud654 \ubd95\uc18c \ud544\ub984\uc740 100kHz\uc5d0\uc11c 1.78, 1MHz\uc5d0\uc11c 1.16\uc758 \ucd08\uc800 \uc720\uc804 \uc0c1\uc218\ub97c \ub2ec\uc131\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uac12\uc740 7.3 MV\/cm\uc758 \ud30c\uad34 \uac15\ub3c4\ub97c \uc720\uc9c0\ud558\uba74\uc11c \uacf5\uae30\uc758 \uc720\uc804 \uc0c1\uc218\uc5d0 \uadfc\uc811\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c a-BN\uc740 \uc5f4\uc545\ud55c \uc870\uac74\uc5d0\uc11c \uc2e4\ub9ac\ucf58\uc73c\ub85c\uc758 \uad6c\ub9ac \ud655\uc0b0\uc744 \ubc29\uc9c0\ud558\uace0 \ubcf4\ud638\ub418\uc9c0 \uc54a\uc740 \uad6c\uc870\uc5d0 \ube44\ud574 \ub514\ubc14\uc774\uc2a4 \uc218\uba85\uc744 3\ubc30 \uc774\uc0c1 \uc5f0\uc7a5\ud569\ub2c8\ub2e4. \uc218\uc9c1 \ud14d\uc2a4\ucc98 \uc2a4\ud37c\ud130\ub9c1\ub41c h-BN\uc740 400\u00b0C \uc774\ud558\uc758 \uc99d\ucc29 \uc628\ub3c4\uc5d0\uc11c 57W\/m*K\uc758 \ud3c9\uba74 \uc5f4\uc804\ub3c4\uc728\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 3D \uc9d1\uc801 \ud68c\ub85c\uc5d0\uc11c 9\uac1c\uc758 \uace0\uc804\ub825 \uacc4\uce35\uc73c\ub85c \uc548\uc815\uc801\uc73c\ub85c \ud655\uc7a5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

2D \uba38\ud2f0\ub9ac\uc5bc\uc6a9 \uc11c\ube0c\uc2a4\ud2b8\ub808\uc774\ud2b8 \ubc0f \uc778\ucea1\uc290\ub808\uc774\uc158 \ub808\uc774\uc5b4<\/h3>\n

\uc721\uac01\ud615 BN\uc740 \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74\uc744 \uc81c\uacf5\ud558\uc5ec SiO\u2082\uc758 \uadf8\ub798\ud540 \uce90\ub9ac\uc5b4 \uc774\ub3d9\uc131\uc744 5,000-10,000 cm\u00b2\/V-s\uc5d0\uc11c 20,000-60,000 cm\u00b2\/V-s\ub85c \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4. \uc644\uc804 \ucea1\uc290\ud654\ub294 \uc800\uc628\uc5d0\uc11c \ubd88\uc21c\ubb3c \uc0b0\ub780\uc744 \ucd5c\ub300 \ub450 \ubc30\uae4c\uc9c0 \uc904\uc5ec\uc90d\ub2c8\ub2e4.<\/p>\n

\uc804\uacc4 \ud6a8\uacfc \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc758 \uac8c\uc774\ud2b8 \uc720\uc804\uccb4<\/h3>\n

\uba87 \uce35\uc758 h-BN\uc740 10-\u2078 ~ 10-\u00b9\u2070 A\/cm\u00b2\uc758 \ub204\uc124 \uc804\ub958\ub85c 10 MV\/cm\ub97c \ucd08\uacfc\ud558\ub294 \uace0\uc7a5 \ud544\ub4dc\ub97c \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. \ubc31\uae08\/hBN \uac8c\uc774\ud2b8 \uc2a4\ud0dd\uc740 \uae08 \uae30\ubc18 \uad6c\uc131\ubcf4\ub2e4 500\ubc30 \ub0ae\uc740 \ub204\uc124 \uc804\ub958\ub97c \ub098\ud0c0\ub0b4\uba70 \ucd5c\uc18c 25 MV\/cm\uc758 \uc720\uc804\uccb4 \uac15\ub3c4\ub97c \ub2ec\uc131\ud569\ub2c8\ub2e4.<\/p>\n

\uc2a4\ud0dd\ud615 \ub514\ubc14\uc774\uc2a4 \uc544\ud0a4\ud14d\ucc98\uc758 \uc5f4 \uad00\ub9ac<\/h3>\n

\uae08 \ub098\ub178\uc2a4\ud2b8\ub9bd\uc744 hBN\uc73c\ub85c \ub36e\uc73c\uba74 \uc628\ub3c4 \uc0c1\uc2b9 \uc18d\ub3c4\uac00 40% \uac10\uc18c\ud558\uace0 \ud56d\ubcf5 \uc804\ub958 \ubc00\ub3c4\uac00 30% \uc99d\uac00\ud569\ub2c8\ub2e4. SiGe \ub098\ub178 \uc640\uc774\uc5b4\uc758 hBN\uc740 \uad11 \uc5ec\uae30 \uc0c1\ud0dc\uc5d0\uc11c \uc791\ub3d9 \uc628\ub3c4\ub97c 500K\uae4c\uc9c0 \ub0ae\ucda5\ub2c8\ub2e4.<\/p>\n

\uc7ac\ub8cc \ud2b9\uc131\ud654 \ubc0f \uc131\ub2a5 \ubca4\uce58\ub9c8\ud06c<\/h2>\n

\uc815\ud655\ud55c \ud2b9\uc131 \ubd84\uc11d \ubc29\ubc95\uc744 \ud1b5\ud574 \uc721\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c\uac00 \uc804\uc790 \ud1b5\ud569\uc5d0 \ub300\ud55c \uc5c4\uaca9\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub294\uc9c0 \uc5ec\ubd80\ub97c \uacb0\uc815\ud569\ub2c8\ub2e4.<\/p>\n

\uc720\uc804\uccb4 \uc0c1\uc218 \ubc0f \ud56d\ubcf5 \uc804\uc555 \uce21\uc815<\/h3>\n

\uae08\uc18d \uc808\uc5f0\uccb4-\uae08\uc18d \ucee4\ud328\uc2dc\ud130 \uad6c\uc870\ub294 \uc815\uc804 \uc6a9\ub7c9-\uc804\uc555 \uce21\uc815\uc744 \ud1b5\ud574 \uc720\uc804 \uc0c1\uc218\ub97c \uc9c1\uc811 \ucd94\ucd9c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud3c9\uba74 \uc678 \uc720\uc804\uc728\uc740 3.4\u00b10.2\ub85c \uc881\ud600\uc9d1\ub2c8\ub2e4. \ub7a8\ud504 \uc804\uc555 \uc2a4\ud2b8\ub808\uc2a4 \ud14c\uc2a4\ud2b8\ub294 \uace0\uc7a5 \uac70\ub3d9\uc744 \uce21\uc815\ud569\ub2c8\ub2e4. \uc587\uc740 \ub098\ub178 \uc2dc\ud2b8\ub294 \uae30\uacc4\uc801 \uc751\ub825\uc774 0\uc778 \uc0c1\ud0dc\uc5d0\uc11c 15.7 MV\/cm\uc758 \ud56d\ubcf5 \ud544\ub4dc\ub97c \ub2ec\uc131\ud558\uace0, 3nm \ud544\ub984\uc740 21 MV\/cm\uc5d0 \ub3c4\ub2ec\ud569\ub2c8\ub2e4. \ub450\uaed8\ub294 \uc720\uc804\uccb4 \uac15\ub3c4\uc5d0 \ud070 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. 4.6nm \uc0d8\ud50c\uc740 15.1 MV\/cm\uc758 E63.2%\ub97c \ubcf4\uc5ec\uc8fc\uba70, 41.3nm \ud544\ub984\uc758 \uacbd\uc6b0 10.4 MV\/cm\ub85c \uac10\uc18c\ud569\ub2c8\ub2e4.<\/p>\n

\uc5f4 \uc804\ub3c4\uc131 \ud14c\uc2a4\ud2b8 \ubc29\ubc95<\/h3>\n

\uac00\ubcc0 \uc2a4\ud3ff \ud06c\uae30\uc758 \uc2dc\uac04 \uc601\uc5ed \uc5f4 \ubc18\uc0ac\uc728\uc740 \uc5f4 \ud22c\uacfc \uae4a\uc774\uc640 \uad00\ub828\ub41c \ub808\uc774\uc800 \uc2a4\ud3ff \uce58\uc218\ub97c \uc870\uc815\ud558\uc5ec \ud3c9\uba74 \ub0b4 \ubc0f \ud3c9\uba74 \ud1b5\uacfc \uc804\ub3c4\ub3c4\ub97c \ub3d9\uc2dc\uc5d0 \uce21\uc815\ud569\ub2c8\ub2e4. \uad11\uc5f4 \ub77c\ub9cc \ubd84\uad11\ubc95\uc740 \uc628\ub3c4\uc5d0 \ub530\ub978 \ud53c\ud06c \ubcc0\ud654\ub97c \ucd94\uc801\ud558\uc5ec \uc5f4 \uc804\ub2ec \ud2b9\uc131\uc744 \ucd94\ucd9c\ud569\ub2c8\ub2e4.<\/p>\n

\ud45c\uba74 \ud488\uc9c8 \ubc0f \uc778\ud130\ud398\uc774\uc2a4 \uc18d\uc131<\/h3>\n

\uc2dc\uc911\uc5d0\uc11c \ud310\ub9e4\ub418\ub294 CVD h-BN\uc740 \uae30\uacc4\uc801 \ubc15\ub9ac\ub97c \ud1b5\ud574 \uc5bb\uc740 \uc7ac\ub8cc\ubcf4\ub2e4 \ub204\uc124 \uc804\ub958\uc640 \uc804\uae30\uc801 \uade0\uc9c8\uc131\uc774 \ud604\uc800\ud788 \ub5a8\uc5b4\uc9d1\ub2c8\ub2e4. h-BN\uacfc Ge \uae30\ud310 \uc0ac\uc774\uc758 \uc778\ud130\ud398\uc774\uc2a4 \ud2b8\ub7a9 \ubc00\ub3c4\ub294 10\u00b9\u00b9~10\u00b9\u00b2 cm-\u00b2 eV-\u00b9 \ubc94\uc704\uc785\ub2c8\ub2e4.<\/p>\n

\uae30\uc874 \uc720\uc804\uccb4 \uc7ac\ub8cc\uc640\uc758 \ube44\uad50<\/h3>\n

\uc9c8\ud654\ubd95\uc18c\uc758 \uc720\uc804 \uc0c1\uc218\ub294 \uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c\uc758 8.0-10 \ubc94\uc704\ub97c \ub2a5\uac00\ud558\uba70 \uace0\uc8fc\ud30c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc2e0\ud638 \uc9c0\uc5f0\uc744 \uc904\uc5ec\uc90d\ub2c8\ub2e4. \ud30c\uad34 \uac15\ub3c4\ub294 61~200kV\/mm\uc5d0 \uc774\ub985\ub2c8\ub2e4. \uc774\ub294 \uc54c\ub8e8\ubbf8\ub098\uc758 8.9~12kV\/mm\ubcf4\ub2e4 \ud6e8\uc52c \ub4a4\ub5a8\uc5b4\uc9c4\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud558\ubbc0\ub85c \ud070 \uc758\ubbf8\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uacb0\ub860<\/h2>\n

\uc721\ubc29\uc815 \uc9c8\ud654\ubd95\uc18c\ub294 \ud0c1\uc6d4\ud55c \uc5f4\uc804\ub3c4\uc728, \uc6b0\uc218\ud55c \uc720\uc804\uccb4 \ud2b9\uc131, \ud654\ud559\uc801 \uc548\uc815\uc131\uc744 \ud1b5\ud574 \ucc28\uc138\ub300 \uc804\uc790\uc81c\ud488\uc758 \ud575\uc2ec \uc18c\uc7ac\ub85c \uc785\uc99d\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ud569\uc131 \uae30\uc220\uc758 \ubc1c\uc804\uc73c\ub85c \ub300\uaddc\ubaa8 \uc0dd\uc0b0\uc774 \uac00\ub2a5\ud574\uc84c\uace0 \ucd08\uc800-K \uc778\ud130\ucee4\ub125\ud2b8, \uac8c\uc774\ud2b8 \uc720\uc804\uccb4 \ubc0f \uc5f4 \uad00\ub9ac \uc2dc\uc2a4\ud15c\uc5d0 \ud1b5\ud569\ud560 \uc218 \uc788\uac8c \ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc774 \uc18c\uc7ac\ub294 \uc911\uc694\ud55c \ud45c\uc900\uc5d0\uc11c \uae30\uc874 \uc720\uc804\uccb4\ubcf4\ub2e4 \ub6f0\uc5b4\ub09c \uc131\ub2a5\uc744 \ubc1c\ud718\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c h-BN\uc740 \ubc18\ub3c4\uccb4 \ud601\uc2e0\uc744 \ucd5c\uc801\ud654\ud558\uace0 \ucd5c\uc2e0 \ub9c8\uc774\ud06c\ub85c\uc804\uc790 \uc7a5\uce58\uc758 \uae4c\ub2e4\ub85c\uc6b4 \uc694\uad6c \uc0ac\ud56d\uc744 \ud574\uacb0\ud558\ub294 \ud575\uc2ec \uae30\uc220\ub85c \uc790\ub9ac\ub9e4\uae40\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n

Q1. \uc721\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c\uac00 \uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc720\uc6a9\ud55c \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong> \uc721\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c\ub294 \ub192\uc740 \uc5f4 \uc804\ub3c4\uc131(\ucd5c\ub300 585W m-\u00b9 K-\u00b9 \ud3c9\uba74 \ub0b4), \uc57d 6eV\uc758 \ub113\uc740 \ubc34\ub4dc\uac2d\uc73c\ub85c \ub6f0\uc5b4\ub09c \uc804\uae30 \uc808\uc5f0\uc131, \uace0\uc628\uc5d0\uc11c \ub6f0\uc5b4\ub09c \ud654\ud559\uc801 \ubc0f \uc5f4\uc801 \uc548\uc815\uc131, \ub0ae\uc740 \uc720\uc804\uc728 \ub4f1 \ud604\ub300 \uc804\uc790 \uc81c\ud488\uc5d0 \uc774\uc0c1\uc801\uc778 \uba87 \uac00\uc9c0 \uc911\uc694\ud55c \ud2b9\uc131\uc744 \uacb0\ud569\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b9\uc131 \ub355\ubd84\uc5d0 h-BN\uc740 \uc5f4 \ubc29\ucd9c, \uc2e0\ud638 \uc9c0\uc5f0 \uac10\uc18c, \ub514\ubc14\uc774\uc2a4 \uc2e0\ub8b0\uc131 \ub4f1 \ubc18\ub3c4\uccb4 \ub514\ubc14\uc774\uc2a4\uc758 \uc8fc\uc694 \uacfc\uc81c\ub97c \ud574\uacb0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

Q2. \uc721\ubc29\uc815 \uc9c8\ud654\ubd95\uc18c\ub294 \uc785\ubc29\uc815 \uc9c8\ud654\ubd95\uc18c\uc640 \uc5b4\ub5bb\uac8c \ub2e4\ub978\uac00\uc694?<\/strong> \uc721\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c(h-BN)\ub294 sp\u00b2 \uacb0\ud569\uc774 \uc788\ub294 \ud751\uc5f0\uacfc \uac19\uc740 \uce35\uc0c1 \uad6c\uc870\uac00 \ud2b9\uc9d5\uc774\uba70 \uc8fc\ubcc0 \uc870\uac74\uc5d0\uc11c \uac00\uc7a5 \uc548\uc815\uc801\uc778 \ub2e4\ud615\uc131 \ubb3c\uc9c8\uc785\ub2c8\ub2e4. \uc785\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c(c-BN)\ub294 \ub2e4\uc774\uc544\ubaac\ub4dc\uc640 \uac19\uc740 \uad6c\uc870\uc5d0 sp\u00b3 \uacb0\ud569\uc774 \uc788\uc73c\uba70 \ub2e4\uc774\uc544\ubaac\ub4dc\uc5d0 \uc774\uc5b4 \ub450 \ubc88\uc9f8\ub85c \ub192\uc740 \uacbd\ub3c4(4,500kp\/mm\u00b2)\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. c-BN\uc740 \uace0\uc555, \uace0\uc628 \ud569\uc131\uc774 \ud544\uc694\ud55c \ubc18\uba74, h-BN\uc740 \uc800\uc628\uc5d0\uc11c \uc99d\ucc29\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. h-BN\uc740 \uc804\uc790\uc81c\ud488 \ubc0f \uc5f4 \uad00\ub9ac\uc5d0 \ud0c1\uc6d4\ud55c \ubc18\uba74, c-BN\uc740 \uc808\uc0ad \uacf5\uad6c \ubc0f \uc5f0\ub9c8\uc7ac\uc5d0 \uc120\ud638\ub418\ub294 \ub4f1 \uac01 \ud615\ud0dc\ub294 \uc11c\ub85c \ub2e4\ub978 \uc6a9\ub3c4\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n

Q3. \uc721\ubc29\uc815 \uc9c8\ud654\ubd95\uc18c \ud544\ub984\uc744 \ud569\uc131\ud558\ub294 \uc8fc\uc694 \ubc29\ubc95\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong> \uc8fc\uc694 \ud569\uc131 \ubc29\ubc95\uc5d0\ub294 \ubcf4\ub77c\uc9c4 \ub610\ub294 \uc554\ubaa8\ub2c8\uc544 \ubcf4\ub780\uacfc \uac19\uc740 \uc804\uad6c\uccb4\ub97c \uc0ac\uc6a9\ud558\ub294 1,000\u00b0C\uc5d0 \uac00\uae4c\uc6b4 \uc628\ub3c4\uc5d0\uc11c\uc758 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD), 250~350\u00b0C\uc5d0\uc11c \uc6d0\uc790 \uc218\uc900\uc758 \ub450\uaed8 \uc81c\uc5b4\uac00 \uac00\ub2a5\ud55c \uc6d0\uc790\uce35 \uc99d\ucc29(ALD), \ud2b8\ub9ac\uc5d0\ud2f8\ubcf4\ub780\uacfc \uc554\ubaa8\ub2c8\uc544\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc6e8\uc774\ud37c \uaddc\ubaa8\uc758 \uade0\uc77c\uc131\uc744 \uc704\ud55c \uae08\uc18d-\uc720\uae30\ubb3c CVD(MOCVD), 400~500\u00b0C\uc5d0\uc11c \uc99d\ucc29\uc774 \uac00\ub2a5\ud55c \uc800\uc628 \ud50c\ub77c\uc988\ub9c8 \uac15\ud654 \uae30\uc220 \ub4f1\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uac01 \ubc29\ubc95\uc740 \ud2b9\uc815 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uacfc \uae30\ud310 \ud638\ud658\uc131\uc5d0 \ub530\ub77c \ub69c\ub837\ud55c \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

Q4. \uc721\ubc29\uc815 \uc9c8\ud654\ubd95\uc18c\uac00 \uadf8\ub798\ud540 \ub514\ubc14\uc774\uc2a4\uc758 \uae30\ud310\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong> \uc721\ubc29\uc815 \uc9c8\ud654\ubd95\uc18c \uc138\ub77c\ubbf9\uc740 \uc6d0\uc790\uc801\uc73c\ub85c \ub9e4\ub044\ub7fd\uace0 \ud654\ud559\uc801\uc73c\ub85c \ubd88\ud65c\uc131\uc778 \ud45c\uba74\uc744 \uc81c\uacf5\ud558\uc5ec \uadf8\ub798\ud540 \uc131\ub2a5\uc744 \ud68d\uae30\uc801\uc73c\ub85c \uac1c\uc120\ud569\ub2c8\ub2e4. \uae30\uc874 \uc774\uc0b0\ud654\uaddc\uc18c \ub300\uc2e0 h-BN \uae30\ud310 \uc704\uc5d0 \uadf8\ub798\ud540\uc744 \ubc30\uce58\ud558\uba74 \uce90\ub9ac\uc5b4 \uc774\ub3d9\ub3c4\uac00 5,000~10,000 cm\u00b2\/V-s\uc5d0\uc11c 20,000~60,000 cm\u00b2\/V-s\ub85c \uc99d\uac00\ud569\ub2c8\ub2e4. h-BN \uce35 \uc0ac\uc774\uc5d0 \uadf8\ub798\ud540\uc744 \uc644\uc804\ud788 \ucea1\uc290\ud654\ud558\uba74 \ubd88\uc21c\ubb3c \uc0b0\ub780\uc774 \ucd5c\ub300 \ub450 \ubc30\uae4c\uc9c0 \uac10\uc18c\ud558\uc5ec \uc804\uc790 \ud2b9\uc131\uc774 \ub354 \uae68\ub057\ud574\uc9c0\uace0 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc774 \ud5a5\uc0c1\ub429\ub2c8\ub2e4.<\/p>\n

Q5. \uc721\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c\ub294 \uc5b4\ub5a4 \uc720\uc804 \uc0c1\uc218\uc640 \ud56d\ubcf5 \uc804\uc555\uc744 \ub2ec\uc131\ud558\ub098\uc694?<\/strong> \uc721\ubc29\uc815 \uc9c8\ud654 \ubd95\uc18c\ub294 \uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c(8.0-10)\ubcf4\ub2e4 \ub0ae\uc740 4.0~4.4 \ubc94\uc704\uc758 \uc720\uc804 \uc0c1\uc218\ub97c \ub098\ud0c0\ub0b4\ubbc0\ub85c \uace0\uc8fc\ud30c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc2e0\ud638 \uc9c0\uc5f0\uc744 \uc904\uc774\ub294 \ub370 \uc720\ub9ac\ud569\ub2c8\ub2e4. \ud56d\ubcf5 \uc804\uc555\ub3c4 \uc778\uc0c1\uc801\uc778\ub370, \ubc15\ub9c9\uc740 \ub450\uaed8\uc5d0 \ub530\ub77c 15-21 MV\/cm\uc758 \ud56d\ubcf5 \uc804\uacc4\ub97c \ub2ec\uc131\ud569\ub2c8\ub2e4. \ube44\uc815\uc9c8 BN \ud544\ub984\uc740 1.78\uc758 \ucd08\uc800 \uc720\uc804 \uc0c1\uc218\uc5d0 \ub3c4\ub2ec\ud558\uba74\uc11c\ub3c4 7.3 MV\/cm\uc758 \ud56d\ubcf5 \uac15\ub3c4\ub97c \uc720\uc9c0\ud558\uc5ec \uac15\ub825\ud55c \uc804\uae30 \uc808\uc5f0\uc744 \uc81c\uacf5\ud558\uba74\uc11c \uacf5\uae30\uc758 \ud2b9\uc131\uc5d0 \uadfc\uc811\ud569\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"

Hexagonal Boron Nitride: Properties and Applications in Modern Electronics Key Takeaways Hexagonal boron nitride emerges as a game-changing material that […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ngg_post_thumbnail":0,"footnotes":""},"categories":[4],"tags":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/boronnitrideceramic.com\/ko\/wp-json\/wp\/v2\/posts\/320"}],"collection":[{"href":"https:\/\/boronnitrideceramic.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/boronnitrideceramic.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/boronnitrideceramic.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/boronnitrideceramic.com\/ko\/wp-json\/wp\/v2\/comments?post=320"}],"version-history":[{"count":1,"href":"https:\/\/boronnitrideceramic.com\/ko\/wp-json\/wp\/v2\/posts\/320\/revisions"}],"predecessor-version":[{"id":321,"href":"https:\/\/boronnitrideceramic.com\/ko\/wp-json\/wp\/v2\/posts\/320\/revisions\/321"}],"wp:attachment":[{"href":"https:\/\/boronnitrideceramic.com\/ko\/wp-json\/wp\/v2\/media?parent=320"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/boronnitrideceramic.com\/ko\/wp-json\/wp\/v2\/categories?post=320"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/boronnitrideceramic.com\/ko\/wp-json\/wp\/v2\/tags?post=320"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}